JPH01128155U - - Google Patents
Info
- Publication number
- JPH01128155U JPH01128155U JP2478488U JP2478488U JPH01128155U JP H01128155 U JPH01128155 U JP H01128155U JP 2478488 U JP2478488 U JP 2478488U JP 2478488 U JP2478488 U JP 2478488U JP H01128155 U JPH01128155 U JP H01128155U
- Authority
- JP
- Japan
- Prior art keywords
- light
- pellet
- amount
- light amount
- receiving device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2478488U JPH01128155U (en]) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2478488U JPH01128155U (en]) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01128155U true JPH01128155U (en]) | 1989-09-01 |
Family
ID=31244941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2478488U Pending JPH01128155U (en]) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01128155U (en]) |
-
1988
- 1988-02-26 JP JP2478488U patent/JPH01128155U/ja active Pending